ファクトリーオートメーション
SMIF製品
Leverage I/O devices that provide a Standard Mechanical Interface (SMIF) interface to fab automation tools with minimal risk of contamination. Brooks’ ultra-clean SMIF solutions deliver Class 0.1 performance at wafer level in a Class-1000 environment for high reliability and short recovery time. Our SEMI- and CE-compliant SMIF products offer the high interoperability, world-class performance, and low cost of ownership that today’s manufacturers demand.
ERGOSPEED II
ERGOSPEED II™ is a highly reliable, ultra-clean 200mm SMIF load port solution for adaptive tool interface applications. Featuring Brooks’ superior laminar airflow design, ERGOSPEED II ensures maximum cleanliness within the cassette and wafer area to prevent contamination. The solution’s proven design enhanced by extensive reliability testing, and continuous improvements delivers exceptional fab performance. It’s no wonder that several thousand EROSPEED II units have been installed in fabs across the globe.
Key Features
- Pod platform presentation at the ergonomic loading height of 90-0mm
- Availability of transfer arm in various configurations
SLR 200 M Series
Be prepared to manually open a SMIF pod quickly and easily for accessing wafers or reitcles. Brooks’ SLR 200 M Series robots allow for manual loading and unloading of 8-inch standard SMIF pods containing a wafer or reticle cassette.
Key Features
- Availability in both front-side and rear-side cassette opening configurations
- Finger guard and safety brackets for preventing operator injury
