ファクトリーオートメーション
リソグラフィーオートメーション
Brooks’ Lithography Automation solutions protect reticles the most valuable component of the wafer fabrication process against loss, damage, or contamination. Enhancing the efficiency of a fab’s reticle logistics, our industry-leading reticle stockers and macro inspection tools safeguard against costly disruption in the Litho bay. At the same time, they significantly reduce stepper idle time and keep customer shipments on track. Brooks’ Lithography Automation solutions can work together to provide a complete Automated Reticle Delivery System (ARDS) or can be operated as a standalone products in smaller production environments.
Guardian Bare Reticle Stocker
Brooks’ next-generation Guardian Bare Reticle Stocker is a fully automated, high-density storage system for 5" and 6" reticles. Featuring a unique design with a reticle "vault", the Guardian completely isolates reticles from the surrounding environment. This isolation is achieved using a patented "Circular Air System" which supplies continuous ISO Class 2 ultra-clean air to the reticle vault. With no moving mechanisms inside the vault, the Guardian is the only reticle stocker that completely eliminates any service-related entry into the reticle storage area. In addition, ionizers and static dissipative materials protect reticles from ESD-induced damage. As proven through extensive testing, the Guardian provides the highest degree of reticle protection available in the market today.
Key Features
- Advanced AMC contamination and ESD protection
- Smaller system footprint with higher storage densi0ties
- Reduced Cost of Ownership
- Shorter stocker cycle times
- Support of multiple reticle types
- Improved reliability & serviceability
- Automated delivery capable
ZARIS - Reticle Automation System
The ZARIS reticle automation system from Brooks reliably automates the handling of 5” and 6” reticles from a wide range of shipping and stepper cassettes. This industry-leading reticle sorter/bright light macro inspection/nitrogen cleaning system prevents the mask damage and mishandling typically encountered in manual inspection processes. By consistently presenting defect-free reticles in the proper orientation, ZARIS improves stepper utilization and reduces lithography rework. With a proven record for reliable operation and ease of use, ZARIS accelerates factory ramp while minimizing reticle and pellicle damage. ZARIS complements Brooks’ suite of lithography automation systems including the industry-leading Guardian Reticle Stocker.
Key Features
- Reticle sorting, bright light inspection, and nitrogen cleaning
- Identification of reticles and pellicles
- Use of ESD-safe materials
- Optional features, including:
- optical character recognition for reticle and/or pellicle ID
- microscope inspection
- automated particle detection
- pellicle mounting
- GEM/SECS link
