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AMHS

We offer the most complete set of Automated Material Handling Systems (AMHS) for transporting, storing, and managing semiconductor wafer carriers and reticles. The Automated Material Handling Systems ensure that the right wafer and reticle are in the right place at the right time.

Automated Material Handling provides numerous benefits to semiconductor manufacturers:

Keeps track of thousands of valuable work-in-process wafer carriers. During the production cycle, wafers must traverse a complex, back-and-forth route of up to 10 miles through the fab
Helps increase utilization of expensive process tools by ensuring that wafers are delivered to tools when they're needed
Conserves valuable fab floor space by providing high-density automated storage/retrieval and "zero footprint" overhead transport

The semiconductor industry is currently in the midst of a transition to 300mm wafer manufacturing. 300mm fabs will cost upwards of $2 billion to build, so increasing tool utilization and improving overall factory effectiveness are more important than ever. Intrabay automation is a critical component in helping manufacturers improve their productivity. The larger wafer size means that wafer carriers may weigh up to 22 lbs. (10kg) - too heavy for fab operators to transport manually.

The Automated Material Handling products are the industry's most flexible solution for storing, transporting and controlling wafer carriers between process areas of the fab (Interbay) as well as between process and metrology tools and stockers (Intrabay).

We provide both a Unified Material Handling System solution as well as the traditional segregated system solutions for Interbay, Intrabay, and Lithography automation. All of the material handling systems are controlled by a proven and reliable TransNet Material and Control Software (MCS).

AeroTrak 200/300

The AeroTrak transport system is an overhead monorail system. It is the most flexible wafer transport system available today. AeroTrak provides safe, reliable, and clean (below Class 1) automated transport for semiconductor WIP carriers and lithography reticles. The AeroTrak transport system consists of self-powered intelligent vehicles that traverse a monorail track under the direction of a central routing computer. The system may be designed to fit any fab layout while keeping wafers and reticles up and away from the activity on the fab floor.

AeroTrak forms a flexible transport network through the use of routing modules that allow track intersections, horizontal transfers, parking lots, and elevation changes to be placed throughout the fab. The AeroTrak routing modules enable the construction of short-cuts and alternate transport paths between stockers. Guided by the AeroTrak controller using patented routing algorithms which optimizes vehicle travel to deliver payloads to their destination. TurboStocker

TurboStocker

'The TurboStocker incorporates our most advanced generation of cleanroom robotics, motion control, and software technology to automate the storage and retrieval of wafer carriers for semiconductor fabs. The TurboStocker?s high storage density, scalable capacity, and modular design enable the customer to meet a wide range of WIP storage applications for today's 200mm and 300mm wafer fabs. The TurboStocker integrates seamlessly with our transport systems and the TransNet control suite to provide flexible, fab-wide Interbay and Intrabay AMHS solutions.

AMHS TrueBlue® Service Agreements

Brooks Automation Global Customer Operations Group (GCOG) we are committed to supporting you. Our mission is to exceed expectations in all areas of customer responsiveness. Brooks GCOG is proud to announce that we have expanded our TrueBlue Service Portfolio to cover Automated Material Handling Systems (AMHS). The TrueBlue Service Agreements for AMHS provide a total package of service components for each customer based on three tiers of service:

UltimateBlue Highest Level of Service

With the UltimateBlue Service Agreements, Brooks provides you with a turnkey support program to optimize your AMHS performance while minimizing your Cost of Ownership (CoO). All labor and parts to achieve the performance goals of your factory are supplied by Brooks in these multi-year support contracts.

PerformanceBlue Medium Level of Service

With the PerformanceBlue Service Agreements, Brooks supplies you an advanced multi-year support program that provides you with Brooks’ expertise and best known methods to optimize the performance and CoO of your AMHS.

BasicBlue - Entry Level of Service

BasicBlue is Brooks’ entry level support program that provides you peace of mind that your legacy AMHS system will be: 1) supported with a comprehensive inventory management plan, 2) optimally maintained with a proactive preventative maintenance schedule, 3) protected by a comprehensive parts obsolescence mitigation program and 4) covered by Brooks Embedded Software Maintenance program.

The AMHS TrueBlue Service Agreements are targeted at existing Brooks AMHS installs and will enable customers to extend the performance and life of their AMHS. These service offerings also offer customers a lower cost service alternative to what they currently have.

For more information on the AMHS TrueBlue program, please feel free to contact your local sales representative.