ファクトリーオートメーション

アラインメント・キャリブレーション

ウエハーレベル

Matching the weight of a silicon wafer, this versatile tool's design allows use on end effectors and wafer handling blades as well as in wafer cassettes and quartz boats. The simple-to-use display allows you to level to earth or to your own user-defined reference plane. Intuitive graphics and touch screen simplify operation, while the remote real-time display is convenient for remote adjustments.