ファクトリーオートメーション

アラインメント・キャリブレーション

グラスターゲットウエハー

Tired of paying for the downtime it takes to align your wafer handling equipment only to discover defects caused by misalignment? Looking for a simple way to improve the accuracy and reduce the time it takes to align equipment? Brooks' target wafers are the answer!

Brooks' Alignment Services increases silicon yield and equipment uptime by improving critical wafer handling operations. Products include robotic alignment systems, bridge adapters for 300mm to 200mm, load port alignment systems, electronic levels, carbon fiber and glass dummy wafers, and cassette inspection tools. Services include tool and fab-wide calibration.