ファクトリーオートメーション

アラインメント・キャリブレーション

Brooks offers innovative products and services for tool alignment and wafer handling needs for the semiconductor industry. Brooks, through its Alignment Services offerings, helps fabs and OEMs to:

• Eliminate or reduce planned or unplanned tool down time
• Improve yields
• Accelerate tool deployment
• Create custom service kits for equipment
• Facilitate the transition from 200mm wafers to 300mm wafers

Call 719-471-9888 or email microtool@brooks.com for more information.

Alignment Tools

The 300mm environment places extreme demands on automation. With Brooks' Load Port Alignment Tools, Robot Alignment Tools, Electronic Levels and Dummy Wafers, equipment engineers can ensure that the equipment is precisely aligned. These tools give the assurance that setup is correct as well as the ability to effect predictive maintenance.

Robot Alignment

300mm Alignment
Brooks' RC-3003 Robot alignment tool functions as both an inspection as well as alignment jig to keep your 300mm wafer handling robots aligned.

200mm Alignment
Brooks' RC-2004 and RC-2005 200mm Robot Alignment Tools provide a fast, repeatable, and highly accurate method of aligning your wafer handling equipment.

Electronic Levels

Wafer Levels
Brooks' EL-Series electronic wafers are degined to match the weight and diameter of SEMI standard wafers. These tools are available in 150mm,200mm and 300mm diameters.

Dummy Wafers

Carbon Fiber Wafers
Use Brooks' CF-Series carbon fiber dummy wafers to setup and burn-in equipment without the risk ob breaking silicon wafers.

Glass Target Wafers
Use Brooks' TW-Series glass target wafers to setup equipment when you need the ability to "see through" the wafer for proper alignment.

Interface Tools

Brooks offers a full line of adapters to allow 200mm wafers to be processed by 300mm equipment.Brooks also offers Openers allowing quick access to wafers in FOUP or SMIF.

Adapters -300mm bridge tools

200mm wafers in 300mm FOUP
Brooks’ AM-3005 wafer adapter allows 200mm wafers to be processed inside a 300mm FOUP.

200mm Cassettes on 300mm load ports
Brooks' AM-3006 wafer adapter allows 200mm cassettes to be placed on 300mm load ports.

200mm Cassette in 300mm FOUP
Brooks' AM-3004 cassette adapter allows 200mm wafer processing from a cassette placed in a 300mm FOUP.

11mm lift adapter for 300mm cassettes
Brooks' AM-3003 adapter allows immediate processing of wafer in 300mm cassettes on equipment setup for FOUPS. No need to reteach equipment to account for the 11mm difference!

Openers - access wafers in FOUP or SMIF quickly

300mm FOUP and FOSB opener
Brooks' MPO-3002 is an ergonomically designed manual 300 mm door opener for 25 and 13 capacity FOUPs and FOSBs.

200mm SMIF POD opener
Brooks' MPO-2000 is an ergonomically designed manual door opener for 200mm SMIF PODs.

150mm SMIF POD opener
Brooks' MPO-1500 is an ergonomically designed manual door opener for 150mm SMIF reticle PODs.

Misc - Other FOUP and cassette interfaces

300mm kinematic pins Brooks' Kinematic Coupling Pins are manufactured to strict SEMI standards and packaged in sets of three. Pins are available in either threaded (KP-3000) or press-fit (KP-3001) configurations.

200mm standard platform
Brooks' SP-2000 standard cassette interface platform attaches to your 200mm equiment for easy and correct registation with end user cassettes.

200mm reticle cassette carrier
Brooks' CA-2000 allows 150mm or 125mm reticle handling to be done with standard semiconductor automation components including 200 mm SMIF robots.