自動搬送装置

ウエハー搬送システム 真空エリア

Brooks has earned a leadership position in vacuum transport systems by amassing unparalleled intellectual property that differentiates of our best-in-class products. Our advanced vacuum wafer transport technology is ideally suited for tool automation applications in semiconductor wafer processing, and other complex manufacturing environments. We offer a range of systemsavailable in numerous configurations100mm to 300mm wafer transport that meets specific manufacturing environment and process requirements.

Marathon 2 Transport Systems

Achieve new levels of performance and profitability with the Marathon 2 family of integrated, modular vacuum transport systems (VTS) from Brooks, the initiator of the vacuum cluster tool. Marathon 2 systems, which are designed specifically for 300mm wafer manufacturing, combine the proven reliability of the MagnaTran robot with the latest innovations in cluster tool technology to optimize reliability and performance for OEMs, while delivering low cost of ownership for end users.

Key Features

• 10M+ MCBF MagnaTran Radius robots
• Speed Lock™ high-throughput stacked load locks
• Center Smart™ automatic wafer centering
• Fifth generation power and communication systems
• Built-in hardware and safety interlocks
• Insight™ clear transport lid for visual wafer monitoring
• Compliance with CE, S2, and all other relevant industry standards

Additional Product Information

Marathon Express

The Marathon Express is a modular, configurable Vacuum Transport System (VTS) optimized for superior vacuum performance and high throughput for 100mm, 125mm, 150mm, and 200mm wafer sized applications. The availability of 4, 6, 7, 8 sided versions coupled with its modular architecture allows the MX to be tailored to meet the varying needs of a wide range of process applications. Typical semiconductor applications include PVD, CVD, Etch, MR Head Deposition, MEMS, and compound semiconductor applications.

Additional Product Information

• Reconfigurable for 100 to 200mm size wafers with minimal hardware change.
• 10M+ MCBF MagnaTran Radius robots
• Field-proven VCE6 indexing vacuum load locks for 25 or 26 wafer cassettes with four factory interface options.
• Off-the-shelf vacuum configurations from 3 range to 8 range (torr) base pressure.
• Fifth generation power and communication systems
• Built-in hardware and safety interlocks
• Compliance with CE, S2, and all other relevant industry standards

Additional Product Information