自動搬送装置

ウエハー搬送システム 大気側

Brooks is a technology and performance leader in atmospheric systems designed for factory automation in semiconductor wafer processing and other complex manufacturing environments. Supplying more than 70% of the market’s atmospheric transport system content, Brooks consistently delivers the high performance, ultra-cleanliness and proven reliability required for today’s advanced manufacturing processes. Our EFEMs are thoroughly tested under the most rigorous fab conditions to ensure industry-leading interoperability with manufacturers’ equipment and processes. In addition, our atmospheric systems feature high configurability and a wide selection of off-the-shelf options, making them readily adaptable to meet application-specific needs and keep pace with rapidly evolving industry requirements.

JET™ ATMOSPHERIC TRANSPORT SYSTEM

Take off with a revolutionary approach to semiconductor wafer handling. Jet , the core atmospheric automation subsystem for all Brooks wafer handling systems, is the first EFEM designed at the system level, enabling customers to build process tools around a common core. Jet features a flexible, modular architecture based on industry standards to enable fast set-up, reduced cycle times, and seamless integration with existing fab equipment and processes. Brooks’ Jet family delivers the high-performance ultra-cleanliness and proven reliability that today’s semiconductor manufacturers expect and demand.

Key Features

• Crate-to-Operate™ in less than one hour for fast, easy set-up and integration
• Kinematic mounting system with one-time height and level adjustment
• Brooks’patented direct drive technology and motion control expertise
• End-of-line configurable options
• Uniform set of spare for easy part swapping across multiple tools
• Availability in 2-, 3- and 4-wide configurations

Additional Products Information