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Brooks is a global leader in the production of vacuum handling robots and modules for semiconductor wafer processing, flat panel display manufacturing, and other complex manufacturing environments. We earned our technology and market leadership position by amassing unparalleled intellectual property that differentiates our best-in class products and provides significant throughput, reliability, and serviceability advantages. Brooks’ field-proven wafer transport robots and modules deliver high performance and low total cost of ownership to create manufacturing efficiency and accelerate profits for today’s manufacturers.

MagnaTran® Product Family

Count on the high performance, unmatched reliability, and low cost of ownership of Brooks’ MagnaTran family of vacuum robots. The MagnaTran 7’s patented direct drive technology decreases friction, torque, and wear and tear to dramatically increase mean cycles between failures (MCBF), eliminate vibration, and keep particles to a minimum. The MagnaTran 8 Radius™ robot extends the field-proven direct drive technology of the MagnaTran 7 to a tri-axial drive and leverages proven SCARA arm technology to provide high speed wafer exchanges within a small containment diameter.

Key Features

• High capacity direct drive technology for heavy payload and highest reliability
• Ability to handle wafer sizes through 300mm
• Patented Time Optimal Trajectoryalgorithms for optimized transfer speeds
• PASIV user programmable safety zones for reduced chance of collision during manual operation
• Compliance with CE and SEMI S2 standards

Products

VCE 6 Load Locks

Enable safe, clean AGV, RGV, or human operator transfer of up to 200mm, SEMI standard wafer cassettes. Brooks’ VCE 6 Vacuum Cassette Elevator load lock is available in four styles  Cassette Buffer Load Station with Cassette Transfer Arm, Ergonomic Tilt Platform and Cassette Guide, and Cassette Transfer Arm Platform  to provide cost effective, state-of-the-art factory interfacing that suits your wafer fabrication environment. The modular VCE 6 is designed for ultra-clean and reliable operation with full environmental isolation ranging from 10-6 scale high vacuum to just above atmospheric pressure.

Key Features

• Automated, actuated door
• Isolated drive mechanism
• Chamber configured for a flush, clean room wall interface
• Integral, intelligent sensing capabilities including wafer position in cassette, wafer protruding out of cassette, and cassette on platform
• CE/S2 compliant

InLigner™

The Brooks InLigner coordinates with the MagnaTran robot to provide wafer centering and edge fiducial orientation for 100 to 200 mm semi standard and Jeida standard wafers with either notch or flat edge fiducials. Special configurations are also available for use with transparent and/or square substrates, including quartz masks up to 6 inches square. To maximize the use of transport chamber facets for process modules, the InLinger mounts between the load lock and the transport chamber and allows access to the wafers in the lock.

Key Features

• Coordinates directly with the MagnaTran 7 robot to provide orientation and centering within the vacuum envelope
• Mounts in line with load lock to maximize facet availability for process modules
• Offers capability for transparent and/or square substrates
• Field proven
• CE/S2 compliant