自動搬送装置

ウエハー搬送ロボット 大気側

Brooks Automation’s family of atmospheric robots and modules are an integral part of high performance atmospheric wafer handling solutions in Process Equipment and Cluster Tool Front Ends for semiconductor material handling applications. A technology and performance leader in atmospheric robotics, Brooks offers cutting-edge robotics solutions that enable new levels of tool precision while accelerating installation and set-up for each tool shipment. Leveraging multiple generations of industry-leading automation standards, Brooks’ atmospheric robots and modules provide the optimized mix of throughput, repeatability, and cleanliness required for today’s advanced manufacturing processes.

Razor Atmospheric Transfer Robot

Stay on the cutting edge with Brooks’ Razor atmospheric transfer robots. Razor robotics provide the superior performance, reliability, and ultra-cleanliness required for today’s advanced semiconductor manufacturing. Leveraging Brooks’ kinematic mounting system, patented motional control technology, and reliable direct drive robotics, Razor robots enable fast set-up, high repeatability, and maximum uptime. In addition, Razor features a simplified, highly efficient arm architecture with two links instead of three for a 3-FOUP trackless robot that delivers reliable performanceeven in high-volume, 24x7 production environments.

Key Features

• Proprietary motion control algorithmsTime Optimized Trajectory and Time Optimal Pathsignificantly reduce vibration
• Support for a choice of wafer handling technologies, including high throughput Passive Edge Contact
• Fifth generation direct drive technology
• Drag-and-Drop Sequence Editor for customization of motion and I/O sequences
• Compatibility with Equipe and Reliance robots
• Optional kinematic mounting system with one-time height and level adjustment

Additional Product Information

Razor™ Aligner

Achieve high-precision wafer positioning with the Brooks’ cutting-edge high-performance atmospheric Razor Aligner. Capable of handling 300mm wafers, the Razor Aligner provides superior throughput, repeatability, and cleanliness to meet the stringent requirements of today’s advanced semiconductor manufacturers. Designed for optimal manufacturability, the Razor Aligner and other Razor modules provide high quality out of the box and support fast product installation and reduced lead time. Like all Razor products, the Aligner takes advantage of the Fusion Controls™ automation control solution to enable easy configuration for meeting a wide variety of tool application requirements.

Key Features

• High reliability for up to 10M MCBF performance
• Passive Edge Contactnot gripfor maximum cleanliness and wafer protection
• Patented motion control algorithms for reduced vibration
• Pre-packaged templates for fast tool configuration
• Compliance with SEMI and other industry standards
• Buffer shelf for higher throughput

Razor™ Traverser

Leverage high-speed horizontal motion to give your Razor robot access to multiple process tool, load ports and cassette staging locations within your fab. Brooks’ Razor Traverser takes advantage of the company’s patented direct drive technology to deliver superior reliability and smooth motion control for the lowest possible vibration and particle contamination. At the same time, it operates at high speeds designed to keep pace with the other high-performance Razor modules. Like all Razor products, the Traverser takes advantage of the Fusion Controls automation control solution to enable easy configuration for meeting a wide variety of tool application requirements.

Key Features

• High reliability for up to 10M MCBF performance
• Fifth generation direct drive technology
• Patented motion control algorithms for reduced vibration
• Pre-packaged templates for fast tool configuration
• Compliance with SEMI and other industry standards

Fusion™ Controls

Brooks Automation’s innovative Fusion™ Controls platform is the industry’s most flexible and complete automation control solution. Fully customizable and remarkably easy to use, Fusion controls delivers maximum performance and uptime, while accelerating time to market and tool profitability

Key Features

• Patented motion control technology for unmatched precision and performance
• An extensible, high-speed motion control network for real-time synchronization and coordination of all axes of motion
• Highly configurable software for fab-specific customization and extensions
• Intuitive graphical interfaces for faster, simpler configuration, integration, operation and maintenance
• Visualization and emulation capabilities for efficient troubleshootingeven remotely

Additional Product Information