自動搬送装置

FOUP用ロードポートモジュール

As the world’s largest semiconductor automation supplier and the inventor of LPM technology, Brooks has shipped load port modules across the globe to every semiconductor fab. Brooks load port modules provide ultra-clean performance and superior load port to FOUP interoperability to meet the stringent requirements of today’s semiconductor manufacturers. Load Port Modules minimize cost and complexity by leveraging capabilities readily available in other portions of the process tool. Our units provide all the necessary status and control interfaces and hardware safety interlocks to help ensure safe, efficient, and ultra-clean loading and unloading of wafers to and from the process tool.

VISION™ LOAD PORT MODULE

Set your sights on Vision™, the latest generation of load port modules from Brooks. An intelligent and flexible factory interface module for tool automation, Vision supports flexible configuration, superior reliability, and ultra-clean performance. Unlike LPMs that require substantial lead time for set-up and integration, Vision is designed for maximum interoperability, seamless interchangeability, and ease of configuration. It is compatible with all SEMI-compliant Front Opening Unified Pods (FOUP) and automated Front Opening Shipping Boxes (FOSB) delivered manually or via AMHS vehicles. Vision expands upon the technological innovation and domain expertise built into Brooks’ widely installed FIXLOAD™ product line to deliver the ultimate in manufacturability and reliability.

Key Features

• Local color LCD interface for fab-specific configuration with the touch of a button
• Kinematic mounting system for one-time height and level adjustment
• End-of-line configurable options, including carrier ID, mapping, and E84, for reduced lead times
• Servo motion control for reduced facilities requirement and higher reliability
• BOLTS and FIXLOAD compatibility
• MCBF of >500,000 cycles

Additional Product Information