PTI エアーフローコントローラ:排気圧コントローラー

ブルックスの排気圧コントローラーはプロセスツールから施設排気へ流れる排気を正確にコントロールします。プロセスツールの排気及び設定圧力が変動により影響を受けないようにする為　全てのアプリケーションにおいて　この様な排気圧コントローラーが必要とされます。 ブルックスの排気圧コントローラーはコータデベロッパ、常圧拡散炉、ウエットステーション、RTP（Rapid Thermal Process）、APCVD（常圧CVD）など正確な排気制御が要求される様々なアプリケーションに最適な製品です。

Wafer Track Exhaust Control

ARV 2000

The ARV 2000 offers precise, full-range control over process pressure and reduces the potential for contamination in non-critical processes.

SENTRY 1000 Automated

The SENTRY 1000 Automated Exhaust Controller, with the TIM (Tool Interface Module), offers a full range of programmable set points, making the SENTRY 1000 Automated ideal for any process requiring immediate point-of-use air-flow regulation.

SENTRY 1000-300

The SENTRY 1000-300 with microprocessor based TIM has now been enhanced with the Universal Fast Set-Point (UFSP) algorithm for faster response to process set-point change commands.

SENTRY 9000

The SENTRY 9000 Automated Exhaust Controller, with the TIM (Tool Interface Module), is ideal for tracks with lower flow requirements, such as some SVG tracks.

SENTRY 1000 Pneumatic

The SENTRY 1000 Pneumatic Exhaust Controller furnishes the same reliable, millisecond response to exhaust fluctuation as the other members of the SENTRY 1000 line with the added featute of a dual-stage pneumatic set point control.

SENTRY 1000 Manual

For applications requiring a single set point, the SENTRY 1000 Manual provides exhaust regulation with manual set point control, minimizing cost.

Diffusion Furnace and Thermal Process Control

SENTRY 1510 Automated

The SENTRY 1510 controls pressure in atmospheric diffusion furnaces and other atmospheric process chambers improving process repeatability and reducing contamination.

SENTRY 1510AP

The SENTRY 1510 controls oxidation and diffusion process to a selected absolute pressure, protecting from barometric fluctuations and enabling facilities at different altitudes to run the same process.

SENTRY 1510 Pnuematic

The SENTRY 1510 dual-stage pneumatic controller provides superior pressure control by enabling two set points: one for load/unload, for example, and the other for process.

Energy Saving Controllers

VRV 2000

The VRV-2000 Vacuum Regulation Valve is designed with electronic butterfly valves to maintain a constant pre-set pressure differential between a wet bench and the clean room.